ELECTROCHEMICAL MICROMACHINING FOR NANOFABRICATION
- 作者MEMS AND NANOTECHNOLOGY
- 出版社WILLIAM ANDREW IS AN IMPRINT OF ELSEVIER
- 标注页数270 页
- 文件页数292 页
- 文件大小61.13 MB
- 出版时间2015
- ISBN0323327374
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