SPIE Proceedings [SPIE Laser-Induced Damage in Optical Materials: 1991 - Boulder, CO (Wednesday 23 October 1991)] Laser-Induced Damage in Optical Materials: 1991 - <title>Low-pressure reactive dc-magnetron sputter deposition of metal-oxide thin films</title>Pond, Bradley J.; Du, Tu; Sobczak, J.; Carniglia, Charles K.; Williams, Forrest L.; Bennett, Harold E.; Chase, Lloyd L.; Guenther, Arthur H.; Newnam, Brian E.; Soileau, M. J. · 1992