Electropolishing Silicon in Hydrofluoric Acid Solutions
- 期刊名称Journal of The Electrochemical Society
- 作者Turner, Dennis R.
- 卷第105卷
- 期第7期
- 印刷ISSN0013-4651
- 文件大小774.88KB
- 发表时间1958
- DOI10.1149/1.2428873
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