Sputtering Ion Source for Solids
- 期刊名称Journal of Applied Physics
- 作者Liebl, Helmut J.; Herzog, Richard F. K.
- 卷第34卷
- 期第9期
- 印刷ISSN0021-8979
- 文件大小546.76KB
- 发表时间1963
- DOI10.1063/1.1729826
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