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The Effect of a Silicon-Boron Phase on Thermally Grown Silicon Oxide Films

The Effect of a Silicon-Boron Phase on Thermally Grown Silicon Oxide Films

FitzGibbons, William A.; Kloffenstein, Thomas; Busen, Karl M.

期刊名称Journal of The Electrochemical Society
作者FitzGibbons, William A.; Kloffenstein, Thomas; Busen, Karl M.
卷第117卷
期第2期
印刷ISSN0013-4651
文件大小338.30KB
发表时间1970
DOI10.1149/1.2407485

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