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[WORLD SCIENTIFIC Proceedings of the 8th Italian Conference - Trento, Italy (12 – 14 February 2003)] Sensors and Microsystems - FABRICATION OF A PISTON-TYPE CONDENSER MICROPHONE WITH STRUCTURED POLYSILICON DIAPHRAGM

[WORLD SCIENTIFIC Proceedings of the 8th Italian Conference - Trento, Italy (12 – 14 February 2003)] Sensors and Microsystems - FABRICATION OF A PISTON-TYPE CONDENSER MICROPHONE WITH STRUCTURED POLYSILICON DIAPHRAGM

MARGESIN, B.; FAES, A.; GIACOMOZZI, F.; BAGOLINI, A.; ZEN, M.

作者MARGESIN, B.; FAES, A.; GIACOMOZZI, F.; BAGOLINI, A.; ZEN, M.
文件大小560.60KB
DOI10.1142/9789812702944_0060
页码382-387

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