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SPIE Proceedings [SPIE 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 13 November 2000)] 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - <title>Mask definition by nanoimprint lithography</title>Lyebyedyev, D.; Scheer, Hella-Christin; Behringer, Uwe F. W. · 2001
SPIE Proceedings [SPIE 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 13 November 2000)] 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - 130-nm node mask developmentChabala, Jan M.; Weaver, Suzanne; Alexander, David W.; Lu, Maiying; Kim, Nam-Wook; Cole, Damon M. · 2000
SPIE Proceedings [SPIE 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 13 November 2000)] 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - <title>Comparison of linewidth measurements on COG masks</title>Bosse, Harald; Mirande, Werner; Frase, Carl G.; Brueck, Hans-Juergen; Lehnigk, Sigrid; Behringer, Uwe F. W. · 2001
SPIE Proceedings [SPIE 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 13 November 2000)] 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - <title>Challenges and opportunities for EPL and EUVL masks</title>Mangat, Pawitter J. S.; Behringer, Uwe F. W. · 2001
SPIE Proceedings [SPIE 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 13 November 2000)] 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - <title>Strategies for wafer-scale hot embossing lithography</title>Scheer, Hella-Christin; Schulz, Hubert; Lyebyedyev, D.; Behringer, Uwe F. W. · 2001
SPIE Proceedings [SPIE 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 13 November 2000)] 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - <title>Compact excimer laser light source for optical (mask) inspection systems</title>Pflanz, Tobias; Huber, Heinz; Behringer, Uwe F. W. · 2001
SPIE Proceedings [SPIE 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 13 November 2000)] 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - <title>Mask manufacturing contribution on 248-nm and 193-nm lithography performances</title>Barberet, Alexandra; Fanget, Gilles L.; Richoilley, Jean-Charles; Tissier, Michel; Quere, Yves; Behringer, Uwe F. W. · 2001
SPIE Proceedings [SPIE 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 13 November 2000)] 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - <title>Defect inspection of IPL stencil masks with a KLA 351 tool</title>Ehrmann, Albrecht; Elsner, Annika; Redemann, Rene; Behringer, Uwe F. W. · 2001