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Influence of the abnormal ratio of the dependence of cathode sputtering rate on the current in a glow discharge†

Influence of the abnormal ratio of the dependence of cathode sputtering rate on the current in a glow discharge†

ORLINOV, V.; GORANCHEV, B.; KOURTEV, J.

期刊名称International Journal of Electronics
作者ORLINOV, V.; GORANCHEV, B.; KOURTEV, J.
卷第36卷
期第4期
印刷ISSN0020-7217
电子ISSN1362-3060
文件大小204.00KB
发表时间1974-04
DOI10.1080/00207217408900427
页码431-439

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