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ChemInform Abstract: EFFECT OF REACTANT NITROGEN PRESSURE ON THE MICROSTRUCTURE AND PROPERTIES OF REACTIVELY SPUTTERED SILICON NITRIDE FILMS

ChemInform Abstract: EFFECT OF REACTANT NITROGEN PRESSURE ON THE MICROSTRUCTURE AND PROPERTIES OF REACTIVELY SPUTTERED SILICON NITRIDE FILMS

MOGAB, C. J.; PETROFF, P. M.; SHENG, T. T.
  • 期刊名称Chemischer Informationsdienst
  • 作者MOGAB, C. J.; PETROFF, P. M.; SHENG, T. T.
  • 卷第6卷
  • 期第35期
  • 印刷ISSN0009-2975
  • 文件大小112.49KB
  • 发表时间1975-09-02
  • DOI10.1002/chin.197535045
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