Thin film pdin compound for integrated circuit metallization

E. M. Savitsky; V. P. Polyakova; N. B. Gorina; A. P. Dostanko; J. D. Chistyakov; V. A. Zelenkov

作者E. M. Savitsky; V. P. Polyakova; N. B. Gorina; A. P. Dostanko; J. D. Chistyakov; V. A. Zelenkov
卷第5卷
期第3期
印刷ISSN0361-5235
电子ISSN1543-186X
文件大小324.41KB
发表时间1976-06
DOI10.1007/bf02663276
页码341-349

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