Interference position monitoring system employing Ronchi gratings
- 期刊名称Review of Scientific Instruments
- 作者Jablonowski, D. P.
- 卷第47卷
- 期第1期
- 印刷ISSN0034-6748
- 文件大小603.11KB
- 发表时间1976
- DOI10.1063/1.1134502
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