Measurement of stress gradients generated by electromigration
- 期刊名称Applied Physics Letters
- 作者Blech, I. A.; Tai, K. L.
- 卷第30卷
- 期第8期
- 印刷ISSN0003-6951
- 文件大小421.77KB
- 发表时间1977
- DOI10.1063/1.89414
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