Quantitative analysis of thin oxide films using x-ray photoelectron spectroscopy and rastered ion bombardment

• 期刊名称Journal of Vacuum Science and Technology
• 作者McIntyre, N. S.
• 卷第14卷
• 期第1期
• 印刷ISSN0022-5355
• 文件大小869.09KB
• 发表时间1977-1
• DOI10.1116/1.569118