Thermal Characteristics of the H[sub 2]SO[sub 4]-H[sub 2]O[sub 2] Silicon Wafer Cleaning Solution
- 期刊名称Journal of The Electrochemical Society
- 作者Pintchovski, F.
- 卷第126卷
- 期第8期
- 印刷ISSN0013-4651
- 文件大小330.65KB
- 发表时间1979
- DOI10.1149/1.2129295
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