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Standardized Terminology for Oxide Charges Associated with Thermally Oxidized Silicon

Standardized Terminology for Oxide Charges Associated with Thermally Oxidized Silicon

Deal, Bruce E.

期刊名称Journal of The Electrochemical Society
作者Deal, Bruce E.
卷第127卷
期第4期
印刷ISSN0013-4651
文件大小352.43KB
发表时间1980
DOI10.1149/1.2129800

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