Low Temperature Thermal Nitridation of GaAs Surfaces
- 期刊名称Japanese Journal of Applied Physics
- 作者Matsuno, Yoichi; Matsushita, Koichi; Hariu, Takashi; Shibata, Yukio
- 卷第19卷
- 期第7期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小312.88KB
- 发表时间1980-7
- DOI10.1143/JJAP.19.L383
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