[Advances in Electronics and Electron Physics] Advances in Electronics and Electron Physics Volume 54 Volume 54 || Electron Physics in Device Microfabrication. II Electron Resists, X-Ray Lithography, and Electron Beam Lithography Update
- 作者Thornton, P.R.
- 文件大小3687.94KB
- 发表时间1980
- DOI10.1016/s0065-2539(08)60097-9
- 页码69-139
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