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Implantation and ion beam mixing in thin film analysis

Implantation and ion beam mixing in thin film analysis

Peter Williams; Judith E. Baker

作者Peter Williams; Judith E. Baker
印刷ISSN0029-554X
文件大小782.75KB
发表时间1981
DOI10.1016/0029-554x(81)90667-4
页码15-24

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