Quantitative analysis of buried interfacial impurity layers by SIMS and RBS
Peter Williams; Judith E. Baker; John A. Davies; Tom E. Jackman
- 作者Peter Williams; Judith E. Baker; John A. Davies; Tom E. Jackman
- 卷第191卷
- 印刷ISSN0167-5087
- 文件大小357.71KB
- 发表时间1981
- DOI10.1016/0029-554x(81)91022-3
- 页码318-322