An electron-microscope-based system for accurate microdimensional measurements
- 作者D.A. Swyt; S.W. Jensen
- 卷第3卷
- 期第1期
- 印刷ISSN0141-6359
- 文件大小1202.81KB
- 发表时间1981
- DOI10.1016/0141-6359(81)90067-2
- 页码11-15
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