Design of an electrostatic ion optical system for microfabrication with 100 Å resolution
- 期刊名称Journal of Vacuum Science and Technology
- 作者Ohiwa, H.
- 卷第19卷
- 期第4期
- 印刷ISSN0022-5355
- 文件大小682.93KB
- 发表时间1981-11
- DOI10.1116/1.571171
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