Measurement of Hydrogen Atom Flux from ECR Plasma
- 期刊名称Japanese Journal of Applied Physics
- 作者Yano, Katsuki; Oyama, Hitoshi; Sakamoto, Yuichi; Okazaki, Kiyohiko; Ishibe, Yukio
- 卷第20卷
- 期第9期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小191.38KB
- 发表时间1981-9
- DOI10.1143/JJAP.20.1765
- 页码1765-1766
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