Aluminum Sputter Etching Using SiCl[sub 4]
- 期刊名称Journal of The Electrochemical Society
- 作者Degenkolb, E. O.
- 卷第129卷
- 期第5期
- 印刷ISSN0013-4651
- 文件大小305.15KB
- 发表时间1982
- DOI10.1149/1.2124045
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