Characterization of plasma-deposited organosilicon thin films
- 作者Krishna G. Sachdev; Harbans S. Sachdev
- 卷第107卷
- 期第3期
- 印刷ISSN0040-6090
- 文件大小317.63KB
- 发表时间1983
- DOI10.1016/0040-6090(83)90403-0
- 页码245-250
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