Mechanism of contamination build-up induced by fine electron probe irradiation
- 作者Nagamitsu Yoshimura; Haruo Hirano; Terukazu Etoh
- 卷第33卷
- 期第7期
- 印刷ISSN0042-207X
- 文件大小688.41KB
- 发表时间1983
- DOI10.1016/0042-207x(83)90658-9
- 页码391-395
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