Vacuum systems for microelectronics
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者O’Hanlon, John F.
- 卷第1卷
- 期第2期
- 印刷ISSN0734-2101
- 文件大小750.21KB
- 发表时间1983
- DOI10.1116/1.572078
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