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Strong 〈100〉 texture formation of polycrystalline silicon films on amorphous insulator by laser recrystallization

Strong 〈100〉 texture formation of polycrystalline silicon films on amorphous insulator by laser recrystallization

Egami, Koji; Kimura, Masakazu

期刊名称Applied Physics Letters
作者Egami, Koji; Kimura, Masakazu
卷第45卷
期第8期
印刷ISSN0003-6951
文件大小435.09KB
发表时间1984
DOI10.1063/1.95425

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