SPIE Proceedings [SPIE 1983 Cambridge Symposium - Cambridge (Monday 7 November 1983)] Spectroscopic Characterization Techniques for Semiconductor Technology I - Spectroscopic Techniques For Characterization Of Gas Phase Species In Plasma Etching And Vapor Deposition Processes
- 作者Wormhoudt, Joda; Stanton, Alan C.; Silver, Joel A.; Bauer, Robert S.; Pollak, Fred H.
- 卷第452卷
- 印刷ISSN0277-786X
- 文件大小464.03KB
- 发表时间1984
- DOI10.1117/12.939293
- 页码88-99