Formation of palladium and titanium silicides by rapid thermal annealing
- 作者D. Levy; J.P. Ponpon; A. Grob; J.J. Grob; P. Siffert
- 卷第129卷
- 印刷ISSN0378-4363
- 文件大小287.06KB
- 发表时间1985
- DOI10.1016/0378-4363(85)90570-4
- 页码205-209
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