Sensitive, low damage surface analysis using resonance ionization of sputtered atoms
- 作者M.J. Pellin; C.E. Young; W.F. Calaway; J.W. Burnett; B. Jørgensen; E.L. Schweitzer; D.M. Gruen
- 卷第18卷
- 印刷ISSN0168-583X
- 文件大小435.80KB
- 发表时间1986
- DOI10.1016/s0168-583x(86)80069-6
- 页码445-451
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