Mass-separated negative-ion-beam deposition system
Ishikawa, Junzo; Takeiri, Yasuhiko; Takagi, Toshinori
- 期刊名称Review of Scientific Instruments
- 作者Ishikawa, Junzo; Takeiri, Yasuhiko; Takagi, Toshinori
- 卷第57卷
- 期第8期
- 印刷ISSN0034-6748
- 文件大小780.25KB
- 发表时间1986
- DOI10.1063/1.1138577