Secondary Electron Emission during Ion Implantation
- 期刊名称Journal of The Electrochemical Society
- 作者Heimann, P. A.
- 卷第133卷
- 期第4期
- 印刷ISSN0013-4651
- 文件大小234.63KB
- 发表时间1986
- DOI10.1149/1.2108675
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