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Effect of addition of TCA (trichloroethane) on the electrical properties of thin oxides processed by a two-step oxidation technique

Effect of addition of TCA (trichloroethane) on the electrical properties of thin oxides processed by a two-step oxidation technique

Bhattacharyya, A; Vorst, C

期刊名称Journal of Physics D: Applied Physics
作者Bhattacharyya, A; Vorst, C
卷第19卷
期第8期
印刷ISSN0022-3727
电子ISSN1361-6463
文件大小314.58KB
发表时间1986-08-14
DOI10.1088/0022-3727/19/8/004

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