Simulation of silicon thermal oxidation
- 期刊名称Physical Review B
- 作者Lee, Chongmu
- 卷第36卷
- 期第5期
- 印刷ISSN0163-1829
- 文件大小351.38KB
- 发表时间1987-8-15
- DOI10.1103/PhysRevB.36.2793
- 页码2793-2798
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