Microstructural studies of reactive ion etched silicon
- 期刊名称Applied Physics Letters
- 作者Jeng, S. J.; Oehrlein, G. S.
- 卷第50卷
- 期第26期
- 印刷ISSN0003-6951
- 文件大小785.26KB
- 发表时间1987
- DOI10.1063/1.97684
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