The Sputter Deposition of Metal Multilayers
- 期刊名称MRS Proceedings
- 作者Somekh, R. E.; Highmore, R. J.; Page, K.; Home, R. J.; Barber, Z. H.
- 卷第103卷
- 电子ISSN1946-4274
- 文件大小434.87KB
- 发表时间1987-1
- DOI10.1557/proc-103-29
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