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SPIE Proceedings [SPIE Semiconductor Conferences - Bay Point, FL (Monday 23 March 1987)] Modern Optical Characterization Techniques for Semiconductors and Semiconductor Devices - <title>Optical Characterization Of Monocrystalline Silicon Carbide Thin Films</title>

SPIE Proceedings [SPIE Semiconductor Conferences - Bay Point, FL (Monday 23 March 1987)] Modern Optical Characterization Techniques for Semiconductors and Semiconductor Devices - Optical Characterization Of Monocrystalline Silicon Carbide Thin Films

Kim, H. J.; Davis, R. F.; Glembocki, Orest J.; Pollak, Fred H.; Song, Jin-Joo

作者Kim, H. J.; Davis, R. F.; Glembocki, Orest J.; Pollak, Fred H.; Song, Jin-Joo
卷第794卷
印刷ISSN0277-786X
文件大小6530.47KB
发表时间1987
DOI10.1117/12.940912
页码183-191

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