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Electron-Beam Exposure(EBE) and Epitaxy of GaAs Films on CaF<sub>2</sub>/Si Structures

Electron-Beam Exposure(EBE) and Epitaxy of GaAs Films on CaF₂/Si Structures

Lee, Hee Chul; Asano, Tanemasa; Ishiwara, Hiroshi; Furukawa, Seijiro

作者Lee, Hee Chul; Asano, Tanemasa; Ishiwara, Hiroshi; Furukawa, Seijiro
卷第27卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小2896.38KB
发表时间1988
DOI10.1143/jjap.27.1616
页码1616-1625

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