Absorption and exposure in positive photoresist
- 期刊名称ao/27/23/ao-27-23-4913.pdf
- 作者Mack, Chris A.
- 卷第27卷
- 期第23期
- 印刷ISSN0003-6935
- 电子ISSN1539-4522
- 文件大小739.60KB
- 发表时间1988
- DOI10.1364/AO.27.004913
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