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[IEEE 1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (13-14 June 1988)] 1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference - Multilevel gold metallization

[IEEE 1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (13-14 June 1988)] 1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference - Multilevel gold metallization

Haberle, K.; Langheinrich, W.; Dudek, V.; Hefner, H.-A.; Isernhagen, R.

作者Haberle, K.; Langheinrich, W.; Dudek, V.; Hefner, H.-A.; Isernhagen, R.
文件大小712.63KB
发表时间1988
DOI10.1109/VMIC.1988.14183
页码117-124

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