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[IEEE 1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (13-14 June 1988)] 1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference - Advanced multiple-step resist etchback planarization

[IEEE 1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (13-14 June 1988)] 1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference - Advanced multiple-step resist etchback planarization

de Bruin, L.; van Laarhoven, J.M.F.G.

作者de Bruin, L.; van Laarhoven, J.M.F.G.
文件大小448.56KB
发表时间1988
DOI10.1109/vmic.1988.14219
页码404-410

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