[IEEE 1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (13-14 June 1988)] 1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference - New development in CVD tungsten technology for multilevel interconnection
- 作者Ahn, K.Y.
- 文件大小655.41KB
- 发表时间1988
- DOI10.1109/vmic.1988.14184
- 页码125-134
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