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Analysis of planar channeling effects on the threshold voltage uniformity of GaAs metal-semiconductor field-effect transistors using stereographic projection

Analysis of planar channeling effects on the threshold voltage uniformity of GaAs metal-semiconductor field-effect transistors using stereographic projection

Mikami, Hitoshi; Uchitomi, Naotaka; Toyoda, Nobuyuki

期刊名称Journal of Applied Physics
作者Mikami, Hitoshi; Uchitomi, Naotaka; Toyoda, Nobuyuki
卷第64卷
期第2期
印刷ISSN0021-8979
文件大小694.58KB
发表时间1988
DOI10.1063/1.341950

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