Area selective chemical vapor deposition of boron carbide achieved by molecular masking
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Jansson, Ulf
- 卷第6卷
- 期第3期
- 印刷ISSN0734-2101
- 文件大小516.93KB
- 发表时间1988-5
- DOI10.1116/1.575281
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