Experimental study on the correlation between thermal-wave signals and dopant profiles for silicon-implanted GaAs
- 期刊名称Applied Physics Letters
- 作者Uchitomi, Naotaka; Mikami, Hitoshi; Toyoda, Nobuyuki; Nii, Riro
- 卷第52卷
- 期第1期
- 印刷ISSN0003-6951
- 文件大小578.16KB
- 发表时间1988
- DOI10.1063/1.99307
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