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An Optimum Design of FIB System with a Beam Crossover

An Optimum Design of FIB System with a Beam Crossover

T. Tsumagari; Y. Kimata; H. Ohiwa; T. Noda

作者T. Tsumagari; Y. Kimata; H. Ohiwa; T. Noda
文件大小410.09KB
发表时间1988
DOI10.1143/JJAP.27.L1576

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