ChemInform Abstract: Conformal Two-Dimensional SiO2 Layers on Silicon Grown by Low Temperature Corona Discharge.
- 期刊名称ChemInform
- 作者LANDSBERGER, L. M.; KAO, D. B.; TILLER, W. A.
- 卷第19卷
- 期第42期
- 印刷ISSN0931-7597
- 文件大小125.71KB
- 发表时间1988-10-18
- DOI10.1002/chin.198842375
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