Materials and devices toward three-dimensional integration

B. Dunne; S. O'Flanagan; L. Hobbs; C.G. Cahill; A. Mathewson; W.A. Lane; M. Montier; D. Chapuis; Y. Gris; L. Karapiperis; G. Garry; D. Dieumegard; J.L. Regolini; D. Bensahel; J.L. Mermet; H. Bono; H. Achard; J.P. Joly; K.M. Barfoot; M. Field; G.F. Hopper; D.J. Godfrey; P.J. Timans; D. Smith; D.A. Williams; R.A. McMahon; H. Ahmed

作者B. Dunne; S. O'Flanagan; L. Hobbs; C.G. Cahill; A. Mathewson; W.A. Lane; M. Montier; D. Chapuis; Y. Gris; L. Karapiperis; G. Garry; D. Dieumegard; J.L. Regolini; D. Bensahel; J.L. Mermet; H. Bono; H. Achard; J.P. Joly; K.M. Barfoot; M. Field; G.F. Hopper; D.J. Godfrey; P.J. Timans; D. Smith; D.A. Williams; R.A. McMahon; H. Ahmed
卷第8卷
印刷ISSN0167-9317
文件大小1215.83KB
发表时间1988
DOI10.1016/0167-9317(88)90019-6
页码235-253

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Materials and devices toward three-dimensional integration