Low temperature tempering-induced changes in bulk resistivity, temperature coefficient of resistivity and stress in physically vapor-deposited TiN
- 作者Craig Ernsberger; A.J. Perry; L.P. Lehman; A.E. Miller; A.R. Pelton; B.W. Dabrowski
- 卷第36卷
- 印刷ISSN0257-8972
- 文件大小721.15KB
- 发表时间1988
- DOI10.1016/0257-8972(88)90003-5
- 页码605-616
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