Cutting of conductors on VLSI chips — A comparison between laser and focused ion beam removal

• 作者Hiroshi Yamaguchi; Akira Shimase; Satoshi Haraichi; Mitsuo Usami; Takahiko Takahashi
• 印刷ISSN0168-583X
• 文件大小685.32KB
• 发表时间1989
• DOI10.1016/0168-583x(89)90322-4
• 页码891-896